Micro Inspection Systems
General Dynamics has deep domain experience in developing precision micro inspection imaging systems used in some of the most demanding applications such as processing semiconductor wafers, read-write heads and hard disks.
With over 30 year experience in the field of distance-measuring laser interferometry, General Dynamics has designed and manufactured thousands of interferometers for the world's largest corporations. Our laser interferometers are primarily used as feedback elements in state-of-art servo motion control systems.
General Dynamics' dual-field-of-view, single objective Microscope is fully automated and can be adapted to a variety of wafer, solar cell and medical inspection technologies. The design features integrated illumination, dual cameras, active position feedback, and an integrated controller.
The system can achieve high bandwidths for an overall increase in through put at the system level. The cameras provide dedicated wide and narrow field-of-view options, allowing for quick target acquisition and high resolution target examination.
The LaserTracTM AutoFocus is designed to perform in the most demanding applications, including inspection systems processing semiconductor wafers, read/write heads, hard disks and even razor blades. It provides real-time autofocus of infinite conjugate objectives developed by Olympus, Leica, Nikon, Zeiss, Mitutoyo and other manufacturers. LaserTrac increases throughput and greatly reduces operator fatigue.
Whether used for automated or manual based inspection, LaserTrac ensures the target image remains in focus over the entire inspection area.